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INVESTIGATION OF THE WIDTH OF THE TRANSITION LAYER IN A SILICIDE-SILICON BILAYER SYSTEM

band gap, nanolayer, ion implantation, morphology, annealing, parameters of energy bands, thin films, valence band ceiling.

Authors

This work presents the results of a study on the parameters of the energy bands of thin films of silicon (Si) and barium disilicide (BaSi₂), as well as the characteristics of the transitional layer between them. Ultraviolet photoelectron spectroscopy (UPS) was used to determine the bandgap width (Eg) and the position of the valence band maximum (EV). A comprehensive approach, including optical electron spectroscopy (OES), UPS, scanning electron microscopy (SEM), and X-ray structural analysis, allowed for the investigation of the composition, surface morphology, and electronic structure of the BaSi₂/Si/BaSi₂/Si (111) nanofilm system. This system was obtained by implanting barium ions (Ba⁺) into silicon followed by annealing. The work determined the parameters of the energy bands and constructed the energy band diagram of the Si/BaSi₂/Si system. Additionally, the depth of formation and thickness of the BaSi₂ layer were studied depending on the energy of the implanted Ba⁺ ions in the range from 0.5 keV to 30 keV. The obtained results are of great importance for understanding the electronic properties and potential applications of such systems in optoelectronics and energy devices.

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