Yokub ERGASHOV, S.E. and Allanazar TASHATOV 2025. SURFACE MORPHOLOGY AND STRUCTURAL FEATURES OF NICKEL SILICIDE THIN FILMS FABRICATED BY ION-PLASMA DEPOSITION . «ACTA NUUz». 3, 3.2 (Oct. 2025), 494–497. DOI:https://doi.org/10.69617/nuuz.v3i3.2.9284.