Балтаходжа УМИРЗАКОВ, Ж.Ж. and Илхом ТУРАПОВ, Е.Э. 2025. OBTAINING THIN FILMS OF SILICIDES MN4SI7, COSI2, FESI ON THE SURFACE OF SI BY DEPOSITION METHODS AND STUDYING THEIR PHYSICAL PROPERTIES . «ACTA NUUz». 3, 3.2.1 (Dec. 2025), 524–527. DOI:https://doi.org/10.69617/nuuz.v3i3.2.1.10079.