Amin MALLAYEV, K. A., & Shohruh SAYFULLOYEV. (2025). FORMATION OF SILICIDE PHASES ON THE SILICON SURFACE AS A RESULT OF Fe–Co–Ni ION IMPLANTATION . «ACTA NUUz», 3(3.2.1), 496–500. https://doi.org/10.69617/nuuz.v3i3.2.1.10022