AMIN MALLAYEV, Kaxar ABDURAXMANOV; SHOHRUH SAYFULLOYEV. FORMATION OF SILICIDE PHASES ON THE SILICON SURFACE AS A RESULT OF Fe–Co–Ni ION IMPLANTATION . «ACTA NUUz», [S. l.], v. 3, n. 3.2.1, p. 496–500, 2025. DOI: 10.69617/nuuz.v3i3.2.1.10022. Disponível em: http://journals.nuu.uz/index.php/actanuuz/article/view/10022. Acesso em: 10 jun. 2026.