AMIN MALLAYEV, Kaxar ABDURAXMANOV; SHOHRUH SAYFULLOYEV. FORMATION OF SILICIDE PHASES ON THE SILICON SURFACE AS A RESULT OF Fe–Co–Ni ION IMPLANTATION . «ACTA NUUz», [S. l.], v. 3, n. 3.2.1, p. 496–500, 2025. Disponível em: http://journals.nuu.uz/index.php/actanuuz/article/view/10022. Acesso em: 16 dec. 2025.