Bahrom EGAMBERDIEV, Amin MALLAEV, and Shohruh SAYFULLOEV. 2024. “STUDY OF THE DISTRIBUTION PROFILE OF ION- IMPLANTED IN SILICON AND INFLUENCE THERMAL ANNEALING ON THE STRUCTYRE OF IRON SILICIDES”. «ACTA NUUz» 3 (3.1):524-28. https://doi.org/10.69617/nuuz.v3i3.1.1947.