Amin MALLAYEV, K. A. and Shohruh SAYFULLOYEV (2025) “FORMATION OF SILICIDE PHASES ON THE SILICON SURFACE AS A RESULT OF Fe–Co–Ni ION IMPLANTATION ”, «ACTA NUUz», 3(3.2.1), pp. 496–500. doi: 10.69617/nuuz.v3i3.2.1.10022.