Amin MALLAYEV, Kaxar ABDURAXMANOV, and Shohruh SAYFULLOYEV. “FORMATION OF SILICIDE PHASES ON THE SILICON SURFACE AS A RESULT OF Fe–Co–Ni ION IMPLANTATION ”. «ACTA NUUz», vol. 3, no. 3.2.1, Dec. 2025, pp. 496-00, doi:10.69617/nuuz.v3i3.2.1.10022.