Bahrom EGAMBERDIEV, Amin MALLAEV, and Shohruh SAYFULLOEV. “STUDY OF THE DISTRIBUTION PROFILE OF ION- IMPLANTED IN SILICON AND INFLUENCE THERMAL ANNEALING ON THE STRUCTYRE OF IRON SILICIDES”. «ACTA NUUz» 3, no. 3.1 (March 29, 2024): 524–528. Accessed May 2, 2026. http://journals.nuu.uz/index.php/actanuuz/article/view/1947.