Балтаходжа УМИРЗАКОВ ЖЖ, Илхом ТУРАПОВ ЕЭ. OBTAINING THIN FILMS OF SILICIDES MN4SI7, COSI2, FESI ON THE SURFACE OF SI BY DEPOSITION METHODS AND STUDYING THEIR PHYSICAL PROPERTIES . NUUz [Internet]. 2025 Dec. 12 [cited 2025 Dec. 15];3(3.2.1):524-7. Available from: http://journals.nuu.uz/index.php/actanuuz/article/view/10079