Bahrom EGAMBERDIEV, Amin MALLAEV, Shohruh SAYFULLOEV. STUDY OF THE DISTRIBUTION PROFILE OF ION- IMPLANTED IN SILICON AND INFLUENCE THERMAL ANNEALING ON THE STRUCTYRE OF IRON SILICIDES. NUUz [Internet]. 2024 Mar. 29 [cited 2026 May 2];3(3.1):524-8. Available from: http://journals.nuu.uz/index.php/actanuuz/article/view/1947