САЙДИМОВ Я, УМАРОВ Ф. IRRADIATION OF SINGLE-CRYSTAL SILICON BY PROTON BEAMS WITH ENERGIES FROM 350 TO 650 KEV. NUUz [Internet]. 2026 Aug. 5 [cited 2026 Sep. 7];3(3.1):493-5. Available from: http://journals.nuu.uz/index.php/actanuuz/article/view/14195