ЭРГАШОВ Ё, САИДРАХМАНОВА А, ТУРАКУЛОВ Б. OBTAINING AND STUDYING THE PHYSICAL PROPERTIES OF NANOSIZED CoSi 2 PHASES IN THE SURFACE REGION OF SILICON. NUUz [Internet]. 2026 Aug. 19 [cited 2026 Sep. 6];3(3.1.1):585-8. Available from: http://journals.nuu.uz/index.php/actanuuz/article/view/14514