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FORMATION OF SILICIDE PHASES ON THE SILICON SURFACE AS A RESULT OF Fe–Co–Ni ION IMPLANTATION

Kaxar ABDURAXMANOV Amin MALLAYEV , Shohruh SAYFULLOYEV
496-500
Abstract : 0
FE-CO-NI ION IMPLANTATSIYASI NATIJASIDA KREMNIY SIRTIDA SILITSI FAZALARNING HOSIL BO‘LISHI (Uzbek) : 0
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