ELEKTROKIMYOVIY O‘YISH JARAYONIDA KREMNIY SIRT MORFOLOGIYASINING SHAKLLANISHI
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Mazkur maqolada anodik oʻyish usuli yordamida gʻovakli kremniy qatlamlarini olish texnologiyasi batafsil bayon etilgan. Tadqiqot davomida elektrokimyoviy oʻyish jarayoniga ta’sir etuvchi asosiy texnologik parametrlar, jumladan, HF kislotasi asosidagi elektrolit tarkibi, oqim zichligi, kuchlanish qiymati hamda oʻyish muddati tizimli ravishda tahlil qilingan. Shuningdek, kremniy plastinasining kristallik holati gʻovakli strukturaning shakllanishiga qay darajada ta’sir koʻrsatishi koʻrib chiqilgan. Olib borilgan eksperimentlar natijasida gʻovaklarning diametri, chuqurligi va qatlamning bir jinsliligi kabi muhim morfologik koʻrsatkichlarni aniq boshqarish imkonini beruvchi optimal texnologik rejimlar aniqlandi. Tadqiqot yakunida olingan ma’lumotlar asosida gʻovakli kremniy hosil qilish jarayonini barqarorlashtirish hamda ushbu usulni sanoat ishlab chiqarishiga tatbiq etish boʻyicha zaruriy texnologik tavsiyalar ishlab chiqilgan
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