This is an outdated version published on 01-07-2025. Read the most recent version.
Tabiiy fanlar

MORPHOLOGICAL AND STRUCTURAL PROPERTIES OF COATINGS OBTAINED BY MAGNETRON SPUTTERING AND VACUUM ARC METHODS

Titanium nitride, magnetron sputtering, vacuum arc method, surface uniformity, corrosion resistance, surface morphology, coating thickness, XRD (X-ray Diffraction Analysis), roughness analysis, nanosurface coatings, electrical conductivity, gas plasma, coating technologies, inert gas, single crystals, cleaning methods, corrosion-resistant coatings.

Authors

  • Vladimir ARUSTAMOV Boburjon KAXRAMONOV Ion plazmasi va lazer texnologiyalari instituti katta ilmiy xodimi,f-m.f.n, Ion plazmasi va lazer texnologiyalari instituti katta ilmiy xodimi, PhD , Uzbekistan
  • Ilyos KHUDAYQULOV Ion plazmasi va lazer texnologiyalari instituti katta ilmiy xodimi, PhD , Uzbekistan

Versions

Imparting wear-resistant and corrosion-resistant properties to the surfaces of products is one of the main tasks of the modern economy. In this work, the properties of titanium nitride coatings applied by magnetron sputtering and vacuum arc methods were studied and compared. The coatings obtained by these two methods are structurally similar; however, their surface uniformity differ significantly.