MAGNETRON CHANGLATISH ORQALI HOSIL QILINGAN Nb YUPQA PLYONKALARINING STRUKTURAVIY VA KOMPOZITSION XUSUSIYATLARI
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Niobiy yupqa plyonkalari turli taglik harorat sharoitlarida DC va RF magnetronli purkash yordamida Si tagliklariga yotqizildi.
Plyonkalarning morfologik va kompozitsion xususiyatlari atom kuch mikroskopiyasi (AFM) hamda to'lqin uzunligi dispersiyali
rentgen floresans spektroskopiyasi (WDXRF) yordamida o‘rganildi. AFM natijalari shuni ko‘rsatdiki, taglikning qizdirilishi
kristalitlarning birlashishiga va sirt g‘adir-budirligining oshishiga olib keladi. WDXRF tahlili dominant Nb Kα emissiya
cho‘qqisiga ega bo‘lgan changlatib o‘stirilgan Nb qatlamlarining yuqori sofligini tasdiqladi. Olingan natijalar shuni ko‘rsatadiki,
cho‘ktirish rejimi va taglik harorati Nb yupqa plyonkalarining mikrotuzilishi va sirt morfologiyasini boshqarishda hal qiluvchi rol
o‘ynaydi, bu esa ularning nanoelektronika va o‘ta o‘tkazuvchan qurilmalarda qo‘llanilishi uchun muhimdir.
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